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微石英音叉电学参数的有限元分析
引用本文:廖兴才,孙雨南,唐琼,崔芳.微石英音叉电学参数的有限元分析[J].北京理工大学学报,2003,23(4):469-472.
作者姓名:廖兴才  孙雨南  唐琼  崔芳
作者单位:北京理工大学,信息科学技术学院光电工程系,北京,100081
基金项目:国家部级科研项目;00309060302;
摘    要:以U形石英音叉为例,用耦合电压自由度的方式模拟电极,提出了石英音叉的静态集总电容模型,用有限元分析中的静态分析方法计算了静态电容参数.通过对电极作短路和开路处理,分别用模态分析和谐波响应分析方法计算了石英音叉的本征频率,两种分析计算结果相同.根据本征频率计算了石英音叉的动态等效电路参数,计算值在实测值的离散范围内.最后综合运用模态分析、谐波响应分析方法计算了石英音叉传感器的电压和电荷灵敏度;可为设计传感器放大电路提供必要的参考。

关 键 词:石英陀螺  静态集总电容  动态等效电路  有限元法
文章编号:1001-0645(2003)04-0469-04
收稿时间:4/9/2003 12:00:00 AM
修稿时间:2003年4月9日

Finite Element Analysis of the Electrical Parameters of Micro Quartz Tuning Fork
LIAO Xing cai,SUN Yu nan,TANG Qiong and CUI Fang.Finite Element Analysis of the Electrical Parameters of Micro Quartz Tuning Fork[J].Journal of Beijing Institute of Technology(Natural Science Edition),2003,23(4):469-472.
Authors:LIAO Xing cai  SUN Yu nan  TANG Qiong and CUI Fang
Institution:Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing100081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing100081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing100081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing100081, China
Abstract:Taking U shape tuning fork as an example and by simulating electrode through coupling voltage freedom, the static lumped capacitance model of quartz tuning forks is presented. Static capacitance parameters are then calculated by means of the static analytic method of finite element analysis. By treating the electrodes as open circuits and short circuits, and using the modal and harmonic analytic methods respectively, inherent frequencies of tuning fork are computed, and the results from the two methods are seen to be coincident. Based on the inherent frequencies the dynamic equivalent circuit parameters are calculated and the result is within the discrete range of experimental values. Finaly, through modal and harmonic analysis, the voltage and charge sensitivity of quartz tuning fork sensors are calculated, which provide a necessary reference for the amplifier design of sensors.
Keywords:quartz gyroscope  static lumped capacitance  dynamic equivalent circuit  finite element method
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