一种用于声学显微镜的新型换能聚焦系统——玻璃金属球面换能器

声学换能与聚焦系统是扫描声学显微镜的主要部件.作者提出并研制成一种新型换能聚焦系统——玻璃金属球面换能器.它克服了过去常用的两种系统——Quate的单透镜及中钵宪贤的冲压成形球面换能的不足,具有避免杂散声场和分辨率高等优点,同时其结构与工艺适宜于在高达数百至数千兆赫的频率下实现.在本文中,作者描述了它的结构、工艺、理论分析及实验测量结果.

A NEW TRANSDUCER-FOCUSING SYSTEM FOR ACOUSTIC MICROSCOPE-GLASS-METAL BASED CONCAVE SPHERICAL TRANSDUCER

The transducer-focusing system is the most important part in a scanning acoustic microscope. We proposed and developed a new type of such system-glass-motal based concave spherical transducer. Compared with Quate's plain transducer-simple lens system and Chubachi's gold cup based concave transducer, there are some unique advantages in our new system. The scattered acoustic field outside the lens is avoided, higher resolution is obtained more easily, and the structure and technology of our new system are appropriate for frequencies up to GHz range. The structupe, material and technology of the metal-glass based concave transducer are described, and the theoretical analysis as well as the experimental results are presented.