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Optimization of PZT-Based Radio-Frequency Filters |
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| Authors: | REN Tianling ZHAO Hongjin CONG PengLIU Yanxiang LIU Jianshe LIU Litian LI ZhijianInstitute of Microelectronics Tsinghua University Beijing China |
| Affiliation: | Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China;Institute of Microelectronics, Tsinghua University, Beijing 100084, China |
| Abstract: | Analytical solutions are presented for the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBAR). The impedance for lead-zirconate-titanate (PZT)-based FBAR was derived using the proper boundary conditions and material parameters. A method is presented to adjust the resonant frequency based on the process and material properties. Ferroelectric-based radio-frequency filters were designed using FBARs. An accurate result is given for the filter impedance which can be used for other piezoelectric devices. |
| Keywords: | lead-zirconate-titanate (PZT) film bulk acoustic resonator (FBAR) filter radio-frequency |
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