| Optimization of PZT-Based Radio-Frequency Filters |
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| 作者姓名： | 任天令 赵宏锦 丛鹏 刘燕翔 刘建设 刘理天 李志坚 |
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| 作者单位： | Institute of Microelectronics，Tsinghua University，Beijing 100084，China，Institute of Microelectronics，Tsinghua University，Beijing 100084，China，Institute of Microelectronics，Tsinghua University，Beijing 100084，China，Institute of Microelectronics，Tsinghua University，Beijing 100084，China，Institute of Microelectronics，Tsinghua University，Beijing 100084，China，Institute of Microelectronics，Tsinghua University，Beijing 100084，China，Institute of Microelectronics，Tsinghua University，Beijing 100084，China |
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| 基金项目： | Supported by the National“973”Project(No.G1999033105)，the National Natural Science Foundation of China(No.69806007) |
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| 摘 要： | Analytical solutions are presented for the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBAR). The impedance for lead-zirconate-titanate (PZT)-based FBAR was derived using the proper boundary conditions and material parameters. A method is presented to adjust the resonant frequency based on the process and material properties. Ferroelectric-based radio-frequency filters were designed using FBARs. An accurate result is given for the filter impedance which can be used for other piezoelectric devices.
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Optimization of PZT-Based Radio-Frequency Filters |
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| REN Tianling,ZHAO Hongjin,CONG Peng
LIU Yanxiang LIU Jianshe,LIU Litian,LI Zhijian
Institute of Microelectronics,Tsinghua University,Beijing ,China.Optimization of PZT-Based Radio-Frequency Filters[J].Tsinghua Science and Technology,2003,8(2). |
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| Authors: | REN Tianling ZHAO Hongjin CONG Peng
LIU Yanxiang LIU Jianshe LIU Litian LI Zhijian
Institute of Microelectronics Tsinghua University Beijing China |
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| Institution: | REN Tianling,ZHAO Hongjin,CONG Peng
LIU Yanxiang LIU Jianshe,LIU Litian,LI Zhijian
Institute of Microelectronics,Tsinghua University,Beijing 100084,China |
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| Abstract: | Analytical solutions are presented for the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBAR). The impedance for lead-zirconate-titanate (PZT)-based FBAR was derived using the proper boundary conditions and material parameters. A method is presented to adjust the resonant frequency based on the process and material properties. Ferroelectric-based radio-frequency filters were designed using FBARs. An accurate result is given for the filter impedance which can be used for other piezoelectric devices. |
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| Keywords: | lead-zirconate-titanate (PZT) film bulk acoustic resonator (FBAR) filter radio-frequency |
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