| 利用扫描电镜进行IC定量电位测量的研究 |
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| 引用本文： | 钱可元,桂裕宗,杜秉初.利用扫描电镜进行IC定量电位测量的研究[J].清华大学学报(自然科学版),1990(1). |
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| 作者姓名： | 钱可元 桂裕宗 杜秉初 |
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| 作者单位： | 电子工程系
(钱可元,桂裕宗),电子工程系(杜秉初) |
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| 摘 要： | 用扫描电镜对ＩＣ样品电位衬度的定量测量技术作了研究,在对ＤＸ－３型扫描电镜 进行改进的基础上,增加了测量辅助装置,设计制作了平面－半球形栅能量分析器及测量 反馈控制系统．实验研究了各种电参数对“Ｓ－曲线”的影响及不同工作状态下测量误差 的变化,在样品电位变化范围为±５Ｖ时,测量误差小于０．２Ｖ,并在理论上对引起测 量误差的因素作了分析估算。
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| 关 键 词： | 扫描 电子探针 能量分析器 |
Study on Quantitative Voltage Measurement of IC Chip by SEM |
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| Qian Keyuan,Gui Yuzong,Du Bingchu.Study on Quantitative Voltage Measurement of IC Chip by SEM[J].Journal of Tsinghua University(Science and Technology),1990(1). |
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| Authors: | Qian Keyuan Gui Yuzong Du Bingchu |
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| Institution: | Qian Keyuan,Gui Yuzong,Du Bingchu Department of Electronic Engineering |
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| Abstract: | In order to measure the voltage contrast of IC chip quantitatively by SEM a plane-hemispherical retarding grid energy analyser and a feed back measurement system were designed and manufactured, which are attached to the improved DX-3 SEM The influences of various parameters on the "S-Curve" were investigated, and measurement errors under different operating conditions were analysed.It is shown that the error is less than 0.2V in the range from - 5V to + 5V specimen voltage. The factors affecting the measurement accuracy are also studied theoretically. |
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| Keywords: | scanning electron probe energy analyser |
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