| 永磁轴向多极场的获得 |
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| 引用本文： | 叶超 宁兆元. 永磁轴向多极场的获得[J]. 苏州大学学报(医学版), 1996, 12(1): 42-45 |
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| 作者姓名： | 叶超 宁兆元 |
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| 作者单位： | 苏州大学物理科学与技术学院(叶超，宁兆元)，苏州大学物理科学与技术学院(甘肇强) |
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| 摘 要： | 本文描述了永磁非对称轴向二极场的结构和形态,这种磁场用于替代同轴线圈提供微波ECR等离子体CVD系统所需的磁场;简要分析了磁场对等离子体特性的影响。
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| 关 键 词： | 永磁体 轴向多极场 |
GENERATION OF THE AXIAL MUTIPOLAR FIELD WITH PERMANETS |
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| Ye Chao Ning Zhaoyuan Gan Zhaoqiang. GENERATION OF THE AXIAL MUTIPOLAR FIELD WITH PERMANETS[J]. Journal of Suzhou University(Natural Science), 1996, 12(1): 42-45 |
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| Authors: | Ye Chao Ning Zhaoyuan Gan Zhaoqiang |
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| Affiliation: | Physics Science and Technology Institute |
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| Abstract: | In this paper, the configuration and shape of permanet nonsymmetrical axial two-pole field are introduced, which offers field for microwave ECR plasma CVD system. The effect of manget field on plasma characteristics is discussed simply. |
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| Keywords: | permanet axial multipolar field |
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