| 微机械技术的现状和发展 |
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| 引用本文： | 谢国章.微机械技术的现状和发展[J].河海大学常州分校学报,1995(2). |
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| 作者姓名： | 谢国章 |
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| 摘 要： | 本文对微机械技术的起源、制造、应用和发展趋向,作概括介绍.
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| 关 键 词： | 微机械 微机电系统 微细加工 |
The Curren State and Development of Micromechanism Technology |
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| Xie Guozhang.The Curren State and Development of Micromechanism Technology[J].Journal of Hohai University Changzhou,1995(2). |
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| Authors: | Xie Guozhang |
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| Institution: | Xie Guozhang |
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| Abstract: | The author briefly introduces the origin, fabrication, application and development trends of micromechanism technology. |
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| Keywords: | micromechanism micro-electro mechanism system micro fabrication |
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