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Preparation of composite abrasives by electrostatic self-assembly method and its polishing properties in Cu CMP |
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| Authors: | Huang Yishen Xu Xuefeng Yao Chunyan Hu Jiande and Peng Wei |
| Institution: | Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology of Ministry ofEducation ＆ Zhejiang Province, Zhejiang University of Technology, Hangzhou 310014, China |
| Abstract: | chemico-mechanical polishing polishing slurry composite abrasives polyelectrolyte copper |
| Keywords: | chemico-mechanical polishing polishing slurry composite abrasives polyelectrolyte copper |
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