|
|||||
|
|
| 微梁谐振器中的空气阻尼 | |
| 引用本文： | 冯闯,赵亚溥,刘冬青.微梁谐振器中的空气阻尼[J].北京科技大学学报,2007,29(8):841-844. |
| 作者姓名： | 冯闯 赵亚溥 刘冬青 |
| 作者单位： | 1. 中国科学院力学研究所非线性力学国家重点实验室,北京,100080;北京科技大学应用科学学院,北京,100083 2. 中国科学院力学研究所非线性力学国家重点实验室,北京,100080 3. 北京科技大学应用科学学院,北京,100083 |
| 摘 要： | 为了研究空气阻尼对谐振器工作性能的影响,基于Euler-Bernoulli假设、梁弯曲振动理论和气体阻尼理论,建立了考虑气体阻尼的梁振动方程,结合边界条件对方程进行了求解,得到了两种不同情况下气体阻尼对微梁谐振器的谐振频率和品质因子的影响.通过两种阻尼对谐振器影响的比较分析,指出在梁形状保持不变(长宽比和高宽比不变)情况下,微梁谐振器存在一个临界压膜厚度,此临界厚度可为器件的设计提供参考. |
| 关 键 词： | 微谐振梁 空气阻尼 谐振频率 品质因子 微梁 谐振器 空气阻尼 设计 器件 临界厚度 膜厚度 临界压 存在 高宽比 长宽比 形状保持 分析 比较 品质因子 谐振频率 情况 求解 梁振动方程 边界条件 |
| 修稿时间： | 2006-02-202006-06-06 |
Air damping in micro-beam resonators |
|
| FENG Chuang,ZHAO Yapu,LIU Dongqing.Air damping in micro-beam resonators[J].Journal of University of Science and Technology Beijing,2007,29(8):841-844. | |
| Authors: | FENG Chuang ZHAO Yapu LIU Dongqing |
| Institution: | 1. State Key Laboratory of Nonlinear Mechanics (LNM |
| Abstract: | To research the effect of air damping on resonators, based on the Euler-Bernoulli assumption, beam vibration mechanism and air damping theory, a vibration equation was established and its solution was obtained according to corresponding boundary conditions. The air damping influences on the resonant frequency and quality factor of a micro-beam resonator were obtained under two different conditions. By analyzing air damping in two different ways, it is found that a critical squeeze-film thickness exists under the condition that the aspect ratio of the beam is constant, and the obtained expression of critical thickness can give some suggestions to devices designing. |
| Keywords: | micro-beam resonator air damping resonant frequency quality factor |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |