| 用于均匀照明的纯位相元件多元化分析 |
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| 引用本文： | 徐俊中,赵逸琼,王炜,李永平.用于均匀照明的纯位相元件多元化分析[J].中国科学技术大学学报,2001,31(5):512-517,534. |
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| 作者姓名： | 徐俊中 赵逸琼 王炜 李永平 |
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| 作者单位： | 中国科学技术大学物理系, |
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| 基金项目： | 国家863-416-2-3.7课题资助项目 |
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| 摘 要： | 论文通过理论分析探讨了用于均匀照明问题的纯位相元件的通用性问题，揭示了纯位相元件的设计与实际应用系统各类参数指标的依赖关系，并且还研究了刻蚀工艺中的正负片问题，它对纯相位元件的工艺制作具有独特的指导意义。
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| 关 键 词： | 纯位相元件 通用性 正负片 均匀照明 多元化分析 刻蚀工艺 衍射光学 惯性约束核聚变系统 |
| 文章编号： | 0253-2778(2001)05-0512-06 |
Analysis of Pure Phase Elements Used for Uniform Illumination from Different Views |
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| XU Jun zhong,ZHAO Yu qiong,WANG Wei,LI Yong ping.Analysis of Pure Phase Elements Used for Uniform Illumination from Different Views[J].Journal of University of Science and Technology of China,2001,31(5):512-517,534. |
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| Authors: | XU Jun zhong ZHAO Yu qiong WANG Wei LI Yong ping |
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| Abstract: | This paper presents an analysis of PPE (Pure Phase Elements) used for uniform illumination from different points of view. The versatility problem of PPE is studied in the first part, which shows the relationship between the design of PPE and the specific parameters of the real application system. The positive and negative plates is introduced in the second part, which is particularly important for the fabrication of PPE. |
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| Keywords: | PPE versatility problem positive and negative plates |
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