| Cu块材及Cu膜的光学常数研究 |
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| 引用本文： | 孙兆奇,蔡琪,何玉平,宋学萍.Cu块材及Cu膜的光学常数研究[J].安徽大学学报(自然科学版),2004,28(2):28-33,39. |
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| 作者姓名： | 孙兆奇 蔡琪 何玉平 宋学萍 |
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| 作者单位： | 安徽大学,物理系,安徽,合肥,230039;安徽大学,物理系,安徽,合肥,230039;安徽大学,物理系,安徽,合肥,230039;安徽大学,物理系,安徽,合肥,230039 |
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| 基金项目： | 国家自然科学基金，安徽省自然科学基金，安徽省教育厅科研项目，安徽大学校科研和教改项目 |
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| 摘 要： | 用反射式动态椭圆偏振光谱技术对Cu块材、Cu薄膜及Cu厚膜的光学常数进行了测试分析。研究结果表明:与Roberts块材、Johnson厚膜数据相比,不同方法得到Cu的光学常数在谱线形状上基本相似,但在数值上存在一定差别;在波长为250～830nm范围内,Cu块材和膜的折射率n与消光系数k分别在0.1～1.5和1.5～5.0之间;随膜厚增加,n值增大,k值减小;厚膜的n、k值与块材的更为接近。同时讨论了光学常数与微结构的关系。
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| 关 键 词： | Cu块材 Cu膜 椭偏光谱 光学常数 微结构 |
| 文章编号： | 1000-2162(2004)02-0028-06 |
A study on the optical constants of Cu bulk and Cu films |
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| SUN Zhao-qi,CAI Qi,HE Yu-ping,SONG Xue-ping.A study on the optical constants of Cu bulk and Cu films[J].Journal of Anhui University(Natural Sciences),2004,28(2):28-33,39. |
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| Authors: | SUN Zhao-qi CAI Qi HE Yu-ping SONG Xue-ping |
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| Abstract: | The optical constants of Cu bulk and sputtering Cu films were studied in details by employing a reflecting spectroscopic ellipsometer. The results show that our n, k curves are identical on the whole in shape but different in numeric value comparing with Robert's bulk data and Johnson's thick film data. In the range of 250～830nm, the refractive index n for Cu bulk and films varies between 0.1 and 1.5, and the extinction coefficient k varies from 1.5 to 5.0. As film thickness increases n raises and k reduces. The optical constants of thick film are closer to those of bulk. The relation between optical constants and microstructure is discussed as well. |
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| Keywords: | Cu bulk Cu films spectroscopic ellipsometry optical constants microstructure |
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