| CSM系列半导体测试系统的研究 |
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| 引用本文： | 陈光遂,何丕模.CSM系列半导体测试系统的研究[J].西安交通大学学报,1993,27(1):13-20. |
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| 作者姓名： | 陈光遂 何丕模 |
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| 作者单位： | 西安交通大学电子工程系
(陈光遂，何丕模，高捷)，西安交通大学电子工程系(陈敏麒) |
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| 基金项目： | “七五”国家重点科技攻关项目 |
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| 摘 要： | CSM系列自动化半导体测试系统是由微型计算机、接口电路单元以及各种模拟测量仪器组合构成的专用测试系统.测量仪器是1MHz电容仪、微电流仪、线性斜坡电压发生器等等.本文重点介绍CSMⅢ型系统.该系统已配备七套应用软件,既可用于集成电路芯片生产过程中关键工序的在线工艺检测,也可用于半导体器件的研究工作.本系统可以替代进口的类似检测设备.
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| 关 键 词： | 半导体器件 测试系统 CSM系列 |
A NEW SERIES OF COMPUTERIZED SEMICONDUCTOR MEASUREMENT SYSTEMS |
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| Chen Guangsui He Pimo Gao Jie Chen Mingi.A NEW SERIES OF COMPUTERIZED SEMICONDUCTOR MEASUREMENT SYSTEMS[J].Journal of Xi'an Jiaotong University,1993,27(1):13-20. |
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| Authors: | Chen Guangsui He Pimo Gao Jie Chen Mingi |
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| Institution: | Department of Electronic Engineering |
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| Abstract: | A new CSM series of automated semiconductor measurement systems has been developed. It is the combination of a digital microcomputer and an interface-circuits unit with analog instruments: 1 MHz capacitance meter,pico-ampere meter and linear ramp voltage generator,etc. The system provides seven application programs, which can be used for both on-line process monitoring in fabrication of integrated circuits and semiconductor device research. |
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| Keywords: | semiconductor devices semiconductor materials integrated circuit technology measuring systems testing equipment |
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