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HT-7超导托卡马克第一壁硼碳膜的XPS分析
引用本文:方应翠,张晓东,辜学茂,王小明,何也熙. HT-7超导托卡马克第一壁硼碳膜的XPS分析[J]. 合肥工业大学学报(自然科学版), 2002, 25(4): 595-598
作者姓名:方应翠  张晓东  辜学茂  王小明  何也熙
作者单位:1. 合肥工业大学,机械与汽车工程学院,安徽,合肥,230009
2. 中国科学院,等离子体物理研究所,安徽,合肥,230031
3. 清华大学,工程物理系,北京,100089
摘    要:通常在托卡马克第一壁沉积 1层硼碳膜 ,以降低托卡马克等离子体的氧杂质。现在 H T-7第一壁位置处放置几个石墨和不锈钢基体样品 ,与 H T-7一起硼化 ,硼化后取出部分样品膜 ,剩余样品留在真空室接受聚变等离子体的轰击 ,通过对鲜膜和轰击膜进行 XPS分析 ,发现膜由硼、碳、氧和铁等元素组成 ,并在膜深度方向上均匀分布 ,在成膜及等离子体轰击过程中 ,膜对氧有强吸收

关 键 词:硼碳膜  等离子体轰击  XPS分析
文章编号:1003-5060(2002)04-0595-04
修稿时间:2001-06-04

Analysis of a-B/C∶H film deposited in HT-7 superconducting tokamak by XPS
FANG Ying-cui ,ZHANG Xiao-dong ,GU Xue-mao ,WANG Xiao-ming ,HE Ye-xi. Analysis of a-B/C∶H film deposited in HT-7 superconducting tokamak by XPS[J]. Journal of Hefei University of Technology(Natural Science), 2002, 25(4): 595-598
Authors:FANG Ying-cui   ZHANG Xiao-dong   GU Xue-mao   WANG Xiao-ming   HE Ye-xi
Affiliation:FANG Ying-cui 1,ZHANG Xiao-dong 2,GU Xue-mao 2,WANG Xiao-ming 2,HE Ye-xi 3
Abstract:Boron film coated on plasma facing walls has been utilized to reduce the oxygen impurity level by the gettering action. In this study, several samples of graphite were placed at the same radius as the first wall in HT-7 superconducting tokamak. They were boronized with the HT-7 first wall and some of them were bombed by HT-7 plasma. Both the fresh film and the bombed film were analyzed by XPS. It is revealed that the film is a composite of B, C, O and Fe,the distribution of the elements is unchanging in depth and the film gets oxygen during deposition and bombing of plasma.
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