| 离子注入Inp晶格损伤模型的研究 |
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| 引用本文： | 张通和. 离子注入Inp晶格损伤模型的研究[J]. 北京师范大学学报(自然科学版), 1989, 9(3): 26-32 |
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| 作者姓名： | 张通和 |
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| 作者单位： | 北京师范大学低能核物理研究所 |
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| 摘 要： |
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| 关 键 词： | 离子注入 晶格 损伤 |
A STUDY OF LATTICE DAMAGE MODEL OF ION IMPLANTATION IN InP |
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| Zhang Tonghe. A STUDY OF LATTICE DAMAGE MODEL OF ION IMPLANTATION IN InP[J]. Journal of Beijing Normal University(Natural Science), 1989, 9(3): 26-32 |
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| Authors: | Zhang Tonghe |
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| Affiliation: | Institute of Low Energy Nuclear Physics |
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| Abstract: | Lattice damage of Bi~+ and N~+ implanted into InP is measured by RBS and channelling techniqure.And the collision cross-section of the ions in InP are calculated.The collision cross-section are related to ions species and flux. The relation of dechannelling minimum x_m of channelling backscattering spectrometry to lattice damage ratio is given using collision theory.The lat- tice damage processes are analysed using the data.Finally,the lattice dama- age model of binary compound InP is discussed. |
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| Keywords: | lattice damage model ion implantation in InP RBS and channelling techniqure collision cross-section dechannelling minimum x_m |
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