| ZAO透明半导体薄膜的研究 |
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| 引用本文： | 林钰,辛荣生,贾晓林. ZAO透明半导体薄膜的研究[J]. 河南教育学院学报(自然科学版), 2008, 17(4): 18-19 |
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| 作者姓名： | 林钰 辛荣生 贾晓林 |
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| 作者单位： | 1. 河南教育学院化学系,河南郑州,450014
2. 郑州大学材料科学与工程学院,河南郑州,450052 |
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| 摘 要： | 采用直流磁控溅射ZAO陶瓷靶的工艺，在玻璃衬底上成功地镀刺了ZAO透明半导体膜，获得了电阻率6×10^-4Ωcm和可见光透过率85％以上的ZAO薄膜最佳光电特性参数．
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| 关 键 词： | 磁控溅射 ZAO膜 电阻率 透光率 |
Study of the ZAO Transparent Semi-Conducting Films |
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| LIN Yu,XIN Rongsheng,JIA Xiaolin. Study of the ZAO Transparent Semi-Conducting Films[J]. Journal of Henan Education Institute(Natural Science Edition), 2008, 17(4): 18-19 |
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| Authors: | LIN Yu XIN Rongsheng JIA Xiaolin |
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| Affiliation: | LIN Yu, XIN Rongsheng, JIA Xiaolin ( 1. Department of Chemistry, Henan Institute of Education, Zhengzhou 450014, China ; 2.College of Material Science and Engineering, Zhengzhou University, Zhengzhou 450052, China) |
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| Abstract: | ZAO transparent semiconductive films were deposited onto the glass substrated by DC magnetron sputtering method. The experimental results show that the perfect electrical and optical parameters of the thin films with resistivity 6×10^-4Ωcm and visible light transmissivity beyond 85% were obtained. |
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| Keywords: | magnetron sputtering ZAO film resistivity transmissivity |
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