| Blue emission from hydrogen-containing a-Si：H／SiO2 multilayers and the investigation of its mechanism |
| |
| 引用本文： | ZHUDa MAZhongyuan MEIJiaxin HANPeigao HUANGXinfan CHENKenji. Blue emission from hydrogen-containing a-Si：H／SiO2 multilayers and the investigation of its mechanism[J]. 科学通报(英文版), 2004, 49(18): 1906-1910. DOI: 10.1007/BF03184279 |
| |
| 作者姓名： | ZHUDa MAZhongyuan MEIJiaxin HANPeigao HUANGXinfan CHENKenji |
| |
| 作者单位： | StateKeyLaboratoryofSolidMicrostructureandDepartmentofPhysics,NanjingUniversity,Nanjing210093,China |
| |
| 摘 要： | A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition and in situ plasma oxidation in a plasma-enhanced chemical vapor deposition system (PECVD). Optical induced blue emission from the samples was observed by the naked eye at room temperature, which has never been reported in the luminescence study of Si/SiO2 multilayers up to now. Both the photoluminescence (PL) peak and the absorption edge show a blue shift as the a-Si:H sublayer thickness decreases. The origin of the blue emission and the effect of hydrogen are discussed.
|
| 关 键 词： | 蓝色光发射 硅 纳米晶体 氧化硅 a-Si：H／SiO2多层 等离子体氧化 蓝色偏移 量子论 |
| 收稿时间： | 2003-12-24 |
| 修稿时间： | 2004-08-18 |
Blue emission from hydrogen-containing a-Si:H/SiO2 multilayers and the investigation of its mechanism |
| |
| Da?ZhuEmail author,Zhongyuan?Ma,Jiaxin?Mei,Peigao?Han,Xinfan?Huang,Kenji?Chen. Blue emission from hydrogen-containing a-Si:H/SiO2 multilayers and the investigation of its mechanism[J]. Chinese science bulletin, 2004, 49(18): 1906-1910. DOI: 10.1007/BF03184279 |
| |
| Authors: | Da?Zhu author-information" > author-information__contact u-icon-before" > mailto:zhuda@eyou.com" title=" zhuda@eyou.com" itemprop=" email" data-track=" click" data-track-action=" Email author" data-track-label=" " >Email author,Zhongyuan?Ma,Jiaxin?Mei,Peigao?Han,Xinfan?Huang,Kenji?Chen |
| |
| Affiliation: | e-mail: zhuda1978 @eyou.com |
| |
| Abstract: | A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition and in situ plasma oxidation in a plasma-enhanced chemical vapor deposition system (PECVD). Optical induced blue emission from the samples was observed by the naked eye at room temperature, which has never been reported in the luminescence study of Si/SiO2 multilayers up to now. Both the photoluminescence (PL) peak and the absorption edge show a blue shift as the a-Si:H sublayer thickness decreases. The origin of the blue emission and the effect of hydrogen are discussed. |
| |
| Keywords: | a-Si:H/SiO2 mutilayers plasma oxidation blue emission blue shift quantum confinement. |
| 本文献已被 CNKI 维普 万方数据 SpringerLink 等数据库收录！ |
| 点击此处可从《科学通报(英文版)》浏览原始摘要信息 |
|
点击此处可从《科学通报(英文版)》下载全文 |
