| 氮气流量对金刚石膜生长的影响 |
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| 引用本文： | 赵利军,毕冬梅. 氮气流量对金刚石膜生长的影响[J]. 长春大学学报, 2008, 18(6): 29-31 |
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| 作者姓名： | 赵利军 毕冬梅 |
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| 作者单位： | 长春大学 人事处，长春大学 理学院 吉林 长春 130022，吉林 长春 130022 |
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| 基金项目： | 863项目（2002AA325090） |
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| 摘 要： | 采用电子辅助热灯丝化学气相沉积（EA-CVD）方法沉积大面积金刚石膜，在金刚石膜的沉积过程中，氮气流量对金刚石膜沉积的影响会直接影响着金刚石膜的生长和质量。用Raman等手段对金刚石膜的生长特性进行了表征。
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| 关 键 词： | 金刚石膜 氮气流量 膜的质量 |
Influence of the nitrogen concentration on the growth of large area diamond film |
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| ZHAO Li-jun BI Dong-mei. Influence of the nitrogen concentration on the growth of large area diamond film[J]. Journal of Changchun University, 2008, 18(6): 29-31 |
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| Authors: | ZHAO Li-jun BI Dong-mei |
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| Affiliation: | ZHAO Li-jun~1 BI Dong-mei~2 |
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| Abstract: | Large area diamond films were deposited by EA-CVD method.During deposition,the growth and quality of diamond films were influenced by the change of the nitrogen concentration.The growth propen'y of diamond film was characterized using Raman spec- trum. |
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| Keywords: | diamond film the nitrogen concentration quality of diamond films |
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