基于eM-Plant的参数化虚拟组合设备

由于大直径晶圆的加工具有严格的逗留时间约束和时间波动, 使得组合设备的调度及其可行性的验证存在很大的困难, 而仿真是一个有效的方法. 如果组合设备的调度存在可行性, 那么, 通过仿真能够找到系统的可行调度. 利用eM-Plant建立了虚拟的单臂组合设备, 该系统是可重配置的. 不同类型的晶圆加工具有不同的晶圆流模式和加工时间, 该虚拟组合设备能够模拟不同的晶圆加工, 而参数化的虚拟组合设备实现了可重用性. 为了实现可视化, 建立了三维模型的虚拟组合设备. 对于操作组合设备的工程人员来说, 该系统是直观和有效的. 最后,通过例子验证了虚拟组合设备是可行的.

EM-Plant-based parameterization virtual cluster tool

With wafer residency time constraint and activity time variation,it is very difficult to schedule a cluster tool and to check if a given schedule is feasible.To solve this problem,simulation can be used to determine if a given schedule is feasible and help to obtain a feasible schedule.For this purpose,in this paper a virtual single-arm cluster tool is developed by using eM-Plant simulation system.A cluster tool is reconfigurable and can be used to process different types of wafers.Different type of wafers has different flow pattern and different processing times.Thus,the virtual cluster tool should be reusable.With parameterization,the system is made to be reusable.It is a 3-dimention model so that it is visualized. Thus,it is useful for practitioners to operate a cluster tool.Examples are presented to demonstrate the applications of the system.