The Fabrication and Characterisation of Low-k Cordierite-Based Glas s-Ceramics by Tape Casting

Cordierite is a promising low-k material in mi cr oelectronic and packaging industries. When it is co-fired with the metal for re alising the multilayer circuits, temperature should be low enough to prevent the melting and/or oxidising of the metal. However, this temperature is usually too low to sinter cordierite. Low melting point glass, therefore, is added to the s toichiometric cordierite to lower the sintering temperature through a liquid-si ntering process. In this research work, cordierite-based g...