| 不同衬底上离子束辅助沉积MoSx膜的研究 |
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| 引用本文： | 王培禄 蒲松. 不同衬底上离子束辅助沉积MoSx膜的研究[J]. 四川大学学报(自然科学版), 1994, 31(4): 495-500 |
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| 作者姓名： | 王培禄 蒲松 |
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| 摘 要： | 利用离子束辅助技术在黄铜与２０＾＃钢衬底上进行了沉积ＭｏＳｘ膜的研究。对该膜在常温大气环境中的摩擦损特性用针－盘磨损试验进行了评价；用ＸＲＤ和ＸＰＳ检查了磨损前后膜的生成相，组分及Ｍｏ元素价态的变化，发现不同度衬底上的ＭｏＳｘ膜在磨损中出现显著不同的结晶学变化，并对这一现角作了讨论。
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| 关 键 词： | 二硫化钼 离子束 沉积 薄膜 |
STUDY ON MoS_x FILMS DEPOSITED ONTO DIFFERENT SUBSTRATES BY ION BEAM ASSISTED TECHNIQUE |
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| Wang Peilu Pu Song Jiang Jingyun Liu Zhongyang. STUDY ON MoS_x FILMS DEPOSITED ONTO DIFFERENT SUBSTRATES BY ION BEAM ASSISTED TECHNIQUE[J]. Journal of Sichuan University (Natural Science Edition), 1994, 31(4): 495-500 |
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| Authors: | Wang Peilu Pu Song Jiang Jingyun Liu Zhongyang |
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| Affiliation: | Institute of Nuclear Science and Technology |
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| Abstract: | MoS_x films in 200nm thickness are deposited onto brass and No.20 steel by the ionbeam asekisted technique , respoctively. Their friction and wear properties are evaluated using a pin-on-disk arrangement in atmosphere at the room temperature ,phases ,composition of these films and changein chemical valence of the Mo element are examined by XRD and XPS before and after the weartestes , respectively. The authors have observed that a different obvious crystallography change ofMoS_x films on the different substrates is appeared. The phenomen is disscused in this paper. |
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| Keywords: | molybdenum disulphide ion beam assisted dposition friction wear |
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