XPS谱线加宽函数的测定

X光电子谱(XPS)已在固体表面成分分析及表面电子能态的研究中获得了广泛的应用。但是由于常用的X光源的非单色性以及电子能谱仪本身的仪器传递特性,常使X光电子谱的谱形加宽,分辨率降低。为此,常采用退卷积的方法对XPS实验数据进行数字处理^1],以提高其分辨率。在退卷积时,首先必须知道谱线的加宽函数。我们采用了两种方法对加宽函数进行了测量,并获得一致的结果。

MEASUREMENT OF XPS LINE SHAPE WIDENING FUNCTION

The transmission function of the electronic energy spectroscope can be obtained from XPS core level speotra by the deconvolution method. Making convolution of the frequency distribution function of X-ray source with it, we have calculated the XPS line shape widening function. The result agrees well with that obtained from the valence level speotra of transition metals.