| 不同后处理方法对反应蒸发制备的氧化锡膜表面形貌的影响 |
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| 引用本文： | 徐延,程珊华.不同后处理方法对反应蒸发制备的氧化锡膜表面形貌的影响[J].苏州大学学报(医学版),1994,10(3):241-243. |
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| 作者姓名： | 徐延 程珊华 |
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| 作者单位： | 苏州大学物理系
(徐延，程珊华，甘肇强)，苏州大学物理系(宁兆元) |
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| 摘 要： |
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| 关 键 词： | 氧化锡 反应蒸发 薄膜 半导体 |
THE SUPERFICIAL MORPEOLOGY OF REACTIVE EVAPORATING PREPARED THIN FILM OF TIN OXIDE AFFECTED BY DIFFERENT POST TREATMENT METHODS |
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| Xu Yan Cheng Shanhua Gan Zhaoqaing Ming Zhaoyuan,Pyhsics.THE SUPERFICIAL MORPEOLOGY OF REACTIVE EVAPORATING PREPARED THIN FILM OF TIN OXIDE AFFECTED BY DIFFERENT POST TREATMENT METHODS[J].Journal of Suzhou University(Natural Science),1994,10(3):241-243. |
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| Authors: | Xu Yan Cheng Shanhua Gan Zhaoqaing Ming Zhaoyuan Pyhsics |
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| Institution: | Xu Yan Cheng Shanhua Gan Zhaoqaing Ming Zhaoyuan
Pyhsics Department |
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| Abstract: | Thin film of tin oxide was prepared by reactive evaporating in this paper. The samples were annealed in argon and air at 300C respectively and were activated by D. C. glow discharge. Superficial morphology of the samples were observed by scanning electron microscopies. It can be seen the particles can be changed in their sizes by post-treatment methods. |
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| Keywords: | Thin film of tin oxide reactive evaporating superficial morphology |
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