| 氧化锌基SnO_2－ZnO UPF制备工艺对其微观结构的影响 |
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| 引用本文： | 王声乐,潘孝仁,黄家桢,沈明庚.氧化锌基SnO_2－ZnO UPF制备工艺对其微观结构的影响[J].华东理工大学学报(自然科学版),1996(1). |
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| 作者姓名： | 王声乐 潘孝仁 黄家桢 沈明庚 |
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| 作者单位： | 华东理工大学物理系，华东理工大学分析测试中心 |
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| 摘 要： | 采用直流气体放电活化反应蒸发沉积法，通过二次蒸镀，制备了以氧化锌为衬底的ＳｎＯ_２－ＺｎＯ复合型功能气敏薄膜。讨论制备工艺对该薄膜微观结构的影响，并提供了宏观性质和微观机理分析结果。
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| 关 键 词： | 氧化锌，氧化锡，超微粒子，晶相结构，复合薄膜 |
Influence of SnO_2-ZnO UPF Compound Technique on Its Surface Morphology and Structures |
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| Wang Shengyue,Pan Xiaoren.Influence of SnO_2-ZnO UPF Compound Technique on Its Surface Morphology and Structures[J].Journal of East China University of Science and Technology,1996(1). |
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| Authors: | Wang Shengyue Pan Xiaoren |
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| Abstract: | SnO2-ZnO UPF(Ultrafine Particle Film)was prepared by DC gas discharge activiting reaction deposition technique. The effects of the compound technique on topography and phase microstructures of the bilayer UPF were studied by SEM,XRD.The results show that the surface particle sizes were mainly controlled by discharge voltage,oxygen gas pressure and the evaporation temperature. This bilayer UPF is a polycrystalline film which grows preferentially in the direction of SnO2(002)plane with a island-like growth,and composed of SnO,SnO2 phase;ZnO UPF layer exhibits amorphous structures. |
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| Keywords: | zine oxide stannide ultrafine particle phase structure compound film |
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