挠性摆式微硅加速度计的模态分析

近年来，在很多应用中，对加速度计动态性能提出较高的要求，故在结构设计阶段必须对其进行动态力学分析，以期使摆片模态满足使用要求。有限元分析是分析复杂结构的一种较新的高精度的分析工具。本文利用有限元分析方法对挠性摆式微硅加速度计进行模态分析。文中按照设计加速度计的尺寸给出仿真的振型图、各模态的谐振频率、加速度作用时模态参与因素、振动响应谱以及各模态产生的位移和应力比较等。得出该加速度计共有六种模态，而第一模态（工作模态）比其它模态作用强很多，是主要模态。

Mode analysis on micromechanical cantilever accelerometer

A micromechanical accelerometer is developed with development of inertial devices and micromechanical microelectronical technique. Some applications need accelerometer that has good dynamic performance. The modes of a micromechanical flexure pendulous silicon accelerometer with the method of finite element analysis were analyzed. The resonance frequencies and simulation figures of oscillation types, modal participation factors, oscillation response spectra are shown. The analysis includes placement and stress of each mode under different acceleration input with the accelerometer size that we designed. According to the analysis, the first mode (along sensitivity axis) is far stronger than other modes and is the most important mode among all six modes. The analysis result gives a reference for micromechanical accelerometer design.