| VLSI－CAM系统的设计与实现 |
| |
| 引用本文： | 向采兰,曾泉,傅建军,陈天鑫. VLSI－CAM系统的设计与实现[J]. 清华大学学报(自然科学版), 1996, 0(9) |
| |
| 作者姓名： | 向采兰 曾泉 傅建军 陈天鑫 |
| |
| 作者单位： | 清华大学微电子所 |
| |
| 基金项目： | 国家“八五”科技攻关项目 |
| |
| 摘 要： | 介绍国内首次设计和开发的超大规模集成电路生产计算机辅助制造（ＶＬＳＩ－ＣＡＭ）系统。描述了集成电路（ＩＣ）芯片生产计算机管理系统的软件结构，工艺管理模式，生产调度原则，ＩＣ生产质量管理等。该系统可以小型机或４８６微机为主机，配置多台中西文图形终端及３８６／４８６微机，形成多用户系统与局域网并存的硬件环境。采用ＯＲＡＣＬＥ和ＳＹＢＡＳＥ数据库系统设计开发了两套系统。并已在国内外几家集成电路生产工厂安装使用，取得了很大的经济效益。
|
| 关 键 词： | VLSI－CAM；系统结构；工艺模型；生产调度；质量管理 |
Design and development of VLSI-CAM system |
| |
| Xiang Cailan, Zen Quan, Fu Jianjun, Chen Tianxin. Design and development of VLSI-CAM system[J]. Journal of Tsinghua University(Science and Technology), 1996, 0(9) |
| |
| Authors: | Xiang Cailan Zen Quan Fu Jianjun Chen Tianxin |
| |
| Abstract: | This paper reports a VLSI computer aided manufacturing (VLSI-CAM) systemdesigned and developed for the first time in China. The VLSI-CAM system framework, thesemiconductor wafer fab. process model, the rule for the IC production scheduling and thequality control are discussed in the paper. The VLSI-CAM system hardware includes asmall-size computer, some microcornputers (386/486 ) and some Chinese-English-graphicsterminals. The system connected in multiple-users mode or in an Ethernet local area network. The object database is the ORACLE or SYBASE database. A few semiconductor factories has adopted the VLSI-CAM system and gained successes. |
| |
| Keywords: | VLSI-CAM system framework process model production scheduling quality control |
| 本文献已被 CNKI 等数据库收录！ |
