| 磁控弧光放电增强等离子体离子镀合成c－BN薄膜 |
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| 引用本文： | 赵永年,何志,王波,邹广田.磁控弧光放电增强等离子体离子镀合成c－BN薄膜[J].吉林大学学报(理学版),1996(1). |
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| 作者姓名： | 赵永年 何志 王波 邹广田 |
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| 作者单位： | 吉林大学超硬材料国家重点实验室 |
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| 摘 要： | 采用能产生高密度等离子体的磁控弧光放电增强等离子体离子镀的方法，制备立方氮化硼（ｃ－ＢＮ）薄膜．
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| 关 键 词： | 立方氮化硼（c－BN）薄膜，磁控弧光放电等离子体，合成 |
The Synthesis of Cubic Nitride Films Using a Magnetic-controlled Arc Discharge Enhanced Plasma Ion Plating Method |
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| Zhao Yongnian,He Zhi,Wang Bo,Zou Guangtian.The Synthesis of Cubic Nitride Films Using a Magnetic-controlled Arc Discharge Enhanced Plasma Ion Plating Method[J].Journal of Jilin University: Sci Ed,1996(1). |
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| Authors: | Zhao Yongnian He Zhi Wang Bo Zou Guangtian |
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| Abstract: | The present paper covers the synthesis of cubic boron nitride (c-BN) films using a new method called magnetically arc discharge enhanced plasma-ion plating (MADEP-IP). |
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| Keywords: | cubic boron nitride (c-BN) film magnetic-controlled arc discharge plasma synthesis |
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