| 一种以SU-8为流道材料的集成微流体 |
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| 引用本文： | 芦琦，陈翔，肖丽君，陈迪.一种以SU-8为流道材料的集成微流体[J].上海交通大学学报,2010,44(11):1519-1523. |
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| 作者姓名： | 芦琦，陈翔，肖丽君，陈迪 |
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| 作者单位： | (上海交通大学 微纳科学技术研究院， 上海 200240） |
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| 摘 要： | 根据微流量传感器测热式原理，利用Comsol多物理场模拟仿真软件，对微流量传感器进行模拟仿真，分析了流量传感器的关键参数对其灵敏性的影响.在此基础上，设计了一种集成在微流体管道内的微流量传感器.以离子束刻蚀方法制作微电极，SU 8负光刻胶直接制作流道，将该负光刻胶与聚二甲基硅氧烷(PDMS)进行键合封装.最后，对该微流量传感器进行了流速测试.
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| 关 键 词： | 流量传感器 负光刻胶 微流体 测热式原理 |
| 收稿时间： | 2010-3-18 |
Design and Manufacture of An Integrated Micro Flow Sensor with SU-8 Channel |
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LU Qi,CHEN Xiang,XIAO Li jun,CHEN Di
.Design and Manufacture of An Integrated Micro Flow Sensor with SU-8 Channel[J].Journal of Shanghai Jiaotong University,2010,44(11):1519-1523. |
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| Authors: | LU Qi CHEN Xiang XIAO Li jun CHEN Di
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| Institution: | (Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University,Shanghai 200240 China)
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| Abstract: | A micro flow sensor integrated inside the flow channel was manufactured by using SU 8 as the flow channel which integrated electrodes inside and packaged through the bonding between SU 8 and PDMS（polydimethylsiloxane）. According to the calorimetric theory, comsol, a multi physics simulation and analysis software, was implemented to build the model of thermal micro flow sensor to analyze the key factors’ influences on its sensitivity. Then a micro flow sensor was designed and manufactured with MEMS technology. Finally, the flow voltage testing of the micro flow sensor was executed. |
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| Keywords: | flow sensor negative photoresist microfluid calorimetric theory |
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