| 用溶胶——凝胶法制备SrTiO3纳米薄膜材料 |
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| 引用本文： | 张志勇 王雪文. 用溶胶——凝胶法制备SrTiO3纳米薄膜材料[J]. 西北大学学报(自然科学版), 2000, 30(5): 400-402,405 |
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| 作者姓名： | 张志勇 王雪文 |
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| 作者单位： | [1]西安理工大学电子工程系,陕西西安 [2]西北大学电子科学系,陕西西安 |
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| 基金项目： | 陕西省教委重点科研基金资助项目!(EE9301) |
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| 摘 要： | 为制备具有电容和压敏特性的ＳｒＴｉＯ３双功能器件，以Ｓｒ（ＮＯ３）２，Ｔｉ（ＯＣ４Ｈ９）４为原料，用溶胶－凝胶方法制备ＳｒＴｉＯ３材料，研究了水和醋酸等对ＳｒＴｉＯ３材料的影响机理，并对其进行Ｘ－射线衍射、红外光谱和ＴＥＭ分析，证明该薄膜为纳米晶体结构，晶粒尺寸为１２－２５ｎｍ。
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| 关 键 词： | 溶胶－－凝胶法 SrTiO3薄膜 纳米晶体 |
Preparation of nano crystalline SrTiO_3 films with Sol-Gel process |
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| ZHANG Zhi Yong ,WANG Xue wen ,ZHAO Wu ,ZHOU Shui xian ,ZHANG Hong. Preparation of nano crystalline SrTiO_3 films with Sol-Gel process[J]. Journal of Northwest University(Natural Science Edition), 2000, 30(5): 400-402,405 |
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| Authors: | ZHANG Zhi Yong WANG Xue wen ZHAO Wu ZHOU Shui xian ZHANG Hong |
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| Affiliation: | ZHANG Zhi Yong 1,WANG Xue wen 2,ZHAO Wu 2,ZHOU Shui xian 2,ZHANG Hong 3 |
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| Abstract: | Nano crystalline SrTiO 3 films were synthesized with Sr(NO 3) 2 and (C 4H 9O) 4 Ti materials by the Sol Gel process.The crystallinity and purity of the films were studied with X ray diffraction spectrometer.The size and the distribution of SrTiO 3 grains were tested by transmission electron microscope(TEM). The effects of CH 3COOH concentration and water concentration on the qualities of SrTiO 3 films were studied,the proper process preparing films was optimized. |
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| Keywords: | SrTiO_3 films Sol-Gel process nano crystalline structure analysis |
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