| 室温溅射掺铝氧化锌薄膜的微结构及其光学性能 |
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| 引用本文： | 翟旺建,;周兆彪. 室温溅射掺铝氧化锌薄膜的微结构及其光学性能[J]. 玉林师范学院学报, 2014, 0(5): 25-28 |
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| 作者姓名： | 翟旺建, 周兆彪 |
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| 作者单位： | [1]玉林师范学院物理科学与工程技术学院,广西玉林537000; [2]富川葛坡初级中学,广西贺州542703 |
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| 基金项目： | 广西教育厅高校科研项目（LX2014305）; 玉林师范学院校级科研项目（2013YJYB10） |
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| 摘 要： | 以硝酸铝晶体和氧化锌粉末为原料,Al和Zn摩尔比为3：100,制备了相对密度为96%、电阻率为2.5×10^-2Ω·cm的掺铝氧化锌（AZO）陶瓷靶材.采用直流磁控溅射法,室温条件下,在玻璃基片上制备了AZO透明导电薄膜.利用扫描电镜和X射线衍射分析了薄膜的微结构.薄膜晶粒尺寸大,分布均匀,可见光透过率为89.92%,光学带隙Eg为2.18 e V,Urbach能量Eu为3.9e V,折射率n随波长的增大,先减小后增大,最后趋于稳定.
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| 关 键 词： | 掺铝氧化锌 室温 直流磁控溅射 折射率 |
Microstructure and Optical properties of Magnetron Sputtered AZO Films at Room Temperature |
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| Affiliation: | ZHAI Wang-jian, ZHOU Zhao-biao (1. College of Physical Science and Technology, Yulin Nomal University, Yulin, Guangxi 537000 2. Fuchuan GePo Junior Middle School, Hezhou, Guangxi 542703) |
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| Abstract: | The Zn O：Al（AZO） ceramic targets were fabricated using Al（NO3）3﹒9H2O and Zn O when the atom ratio of A1 to Zn is 3：100. The relative density of the target was 96%, the resistivity is 2.5×10-2 Ω﹒cm. The AZO thin film was grown by DC magnetron technique at room-temperature on the glass substrate. The film microstructure was analyzed by XRD and Scanning electron microscopy. The film show larger grain size and uniform grain distribution, the transmittance is 89.92%, the optical band gap Eg is 3.63 e V, the Urbach energy Eu is 3.9e V.The refractive index n firstly decreased and then increased with the increase of wavelength, and became stable lastly. |
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| Keywords: | AZO Room temperature DC magnetron sputtering Refractive index |
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