| Si3N4/TiN纳米多层膜的超硬效应 |
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| 引用本文： | 许俊华,顾明元,李戈扬,金燕苹.Si3N4/TiN纳米多层膜的超硬效应[J].上海交通大学学报,2000,34(3):347-350. |
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| 作者姓名： | 许俊华 顾明元 李戈扬 金燕苹 |
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| 作者单位： | 上海交通大学,金属基复合材料国家重点实验室,上海,200030 |
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| 摘 要： | 采用磁控反应溅射工艺制备了Ｓｉ３Ｎ４／ＴｉＮ陶瓷纳米多层膜，运用Ｘ射线衍射、航向电镜和显微硬度仪等对纳米多层膜的微结构、应力状态和硬度进行测试。研究结果表明，Ｓｉ３Ｎ４／ＴｉＮ多层腹中，Ｓｉ３Ｎ４层为非晶态，ＴｉＮ层为晶态，Ｓｉ３Ｎ４／ＴｉＮ多层膜的显微硬度既受调制周期＾的影响，同时又与调制比有关，当调制比ｌｓｉ３Ｎ４／ｌＴｉＮ＝３和调制周期＾＝１２．０ｎｍ左右时，多层膜的显微硬度达到最大值，其数
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| 关 键 词： | 纳米多层膜 氮化硅 超硬效应 氮化钛 陶瓷膜 |
| 修稿时间： | 1998-12-10 |
Superhardness Effects of the Si3N4/TiN Ceramic Nano-Multilayer Films |
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| XU Jun-hua,GU Ming-yuan,LI Ge-yang,JIN Yan-ping.Superhardness Effects of the Si3N4/TiN Ceramic Nano-Multilayer Films[J].Journal of Shanghai Jiaotong University,2000,34(3):347-350. |
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| Authors: | XU Jun-hua GU Ming-yuan LI Ge-yang JIN Yan-ping |
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| Abstract: | An innovative method based on position inverse solution and iteration to solve the problem of positional solution was put forward for the first time. Because it is easy to calculate the position inverse solution, this method is very simple and convenient. The calculated solution by this method is a feasible solution during the motion of mechanism, so the method is significant to the computer real time controlling. |
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| Keywords: | robots positional solution position inverse solution iteration |
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