| A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process |
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| 引用本文： | 张卫平 陈文元 赵小林 丁桂甫 李胜勇. A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process[J]. 东华大学学报(英文版), 2005, 22(4): 91-93 |
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| 作者姓名： | 张卫平 陈文元 赵小林 丁桂甫 李胜勇 |
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| 作者单位： | Key Laboratory for Thin File and Micro fabrication Technology of Ministry of Education, Research Institute of Micro/ Nargometer Scienceand Technology, Shanghai Jiaotong University, Shanghai 200030 |
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| 基金项目： | This Work is Supported by High Technology Research and Development Program of China （2003AA404210, 2005AA404250） and Science and Technology Research Program of Ministry of Education of China（importence 0307） |
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| 摘 要： | The counter-meshing gears （CMG） discriminator is a mechanically coded lock, which is used to prevent the occurrence of High Consequence Events. This paper advanced a new kind of self-assembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the following characters except low cost： 1） it has only discrimination teeth sections; 2） the thickness of each gear layer exceeds one hundred micrometers; 3） it is axially driven by a separate dectronic magnetic micromotor directly; 4） its CMG is made of metal and is batch fabricated in the assembled state; 5） it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6） it has simpler structure. This device has better strength and reliability in abnormal environment compared to the existing surface micro machining （SMM） discriminator.
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| 关 键 词： | 密码锁 反向啮合齿轮鉴别器 自组装 牺牲层处理 |
| 收稿时间： | 2004-04-27 |
A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process |
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| ZHANG Wei-ping,CHEN Wen-yuan,ZHAO Xiao-lin,DING Gui-fu,LI Sheng-yong. A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process[J]. Journal of Donghua University, 2005, 22(4): 91-93 |
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| Authors: | ZHANG Wei-ping CHEN Wen-yuan ZHAO Xiao-lin DING Gui-fu LI Sheng-yong |
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| Abstract: | The counter-meshing gears (CMG) discriminator is a mechanically coded lock, which is used to prevent the occurrence of High Consequence Events. This paper advanced a new kind of self-assembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the following characters except low cost: 1) it has only discrimination teeth sections; 2) the thickness of each gear layer exceeds one hundred micrometers; 3) it is axially driven by a separate electronic magnetic micromotor directly; 4) its CMG is made of metal and is batch fabricated in the assembled state; 5) it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6) it has simpler structure. This device has better strength and reliability in abnormal environment compared to the existing surface micro machining (SMM) discriminator. |
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| Keywords: | Counter-meshing gears (CMG) discriminator multi-exposure LiGA like process sacrificial layer process |
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