| Sb掺杂ZnO薄膜的缺陷和光学性质研究 |
| |
| 引用本文： | 陈小庆,孙利杰,傅竹西.Sb掺杂ZnO薄膜的缺陷和光学性质研究[J].中国科学技术大学学报,2011,41(1). |
| |
| 作者姓名： | 陈小庆 孙利杰 傅竹西 |
| |
| 作者单位： | 中国科学技术大学物理系,安徽合肥,230026 |
| |
| 基金项目： | 国家自然科学基金重点项目(50532070); 中国科学院三期创新方向性课题(KJCX3.5YW.W01)资助 |
| |
| 摘 要： | 采用磁控溅射方法在6H-SiC单晶片上制备了锑(Sb)掺杂的氧化锌(ZnO)薄膜.利用X射线衍射(XRD)和X射线光电子能谱(XPS)对样品的结晶质量和成分进行了测试.结果表明所得到的ZnO∶Sb薄膜结晶质量良好,掺Sb浓度为原子数分数1%,并且掺入的Sb原子处于Zn原子的位置.利用低温及变温光致发光谱(PL)研究了ZnO∶Sb薄膜的光学性质,观察到了与Sb有关的A0X发射,并且计算得到其受主能级为150meV.分析认为掺Sb的ZnO薄膜中受主来源于SbZn-2VZn复合缺陷.
|
| 关 键 词： | Sb掺杂 低温PL谱 ZnO A0X |
Effect of Sb-doping on the structure and optical properties of ZnO films |
| |
| CHEN Xiaoqing,SUN Lijie,FU Zhuxi.Effect of Sb-doping on the structure and optical properties of ZnO films[J].Journal of University of Science and Technology of China,2011,41(1). |
| |
| Authors: | CHEN Xiaoqing SUN Lijie FU Zhuxi |
| |
| Institution: | CHEN Xiaoqing,SUN Lijie,FU Zhuxi(Department of Physics,University of Science and Technology of China,Hefei 230026,China) |
| |
| Abstract: | Antimony-doped ZnO thin films was deposited on 6H-SiC substrates by RF magetron sputtering.X-ray diffraction showed that the films have high crystalline quality.X-ray photoelectron spectroscopy showed that Sb has been doped into ZnO films,and that the Sb concentration(atom percent) is about 1%.It was also verified that Sb occupies the Zn site but not the O site.Low temperature photoluminescence was carried out to investigate the optical properties of ZnO:Sb films and the A0X related to Sb dopant were observ... |
| |
| Keywords: | antimony-doped low temperature photoluminescence ZnO A0X |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
