| 定值法膜厚监控参数的确定 |
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| 引用本文： | 林永钟,林坚.定值法膜厚监控参数的确定[J].福建师范大学学报(自然科学版),1996,12(4):43-47. |
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| 作者姓名： | 林永钟 林坚 |
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| 摘 要： | 定值法监控技术是制备对称周期膜系的有效方法，本文采用数值计算方法确定定值法膜厚监控参数，实验表明，此方法准确、可靠、方便。
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| 关 键 词： | 定值法 数值计算 薄膜 厚度 监控技术 |
Determining of Film Thickness Monitoring Parameter for Level Method |
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| Lin Yongzhong, Lin Jian.Determining of Film Thickness Monitoring Parameter for Level Method[J].Journal of Fujian Teachers University(Natural Science),1996,12(4):43-47. |
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| Authors: | Lin Yongzhong Lin Jian |
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| Institution: | Institute of Laser |
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| Abstract: | The level method monitoring technology is suitable for Periodic multilayers. This paper use value calculation method to determining the film thickness monitoring parameter of level method. Experimental results show that the method is accurate,reliable and convenient. |
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| Keywords: | level method film thickness monitoring parameter value calculation |
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