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Experiment of soft X-ray lithography using a repetitively laser-produced plasma source |
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| Affiliation: | QUO Yubin(State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022, China) |
| Abstract: | |
| Keywords: | laser-produced plasma soft X-ray lithography resist. |
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