| 一种MEMS保险机构的工艺模拟和静态特性仿真分析 |
| |
| 引用本文： | 聂伟荣,席占稳,李启磊.一种MEMS保险机构的工艺模拟和静态特性仿真分析[J].南京理工大学学报(自然科学版),2010,34(2). |
| |
| 作者姓名： | 聂伟荣 席占稳 李启磊 |
| |
| 作者单位： | 南京理工大学,机械工程学院,江苏,南京,210094 |
| |
| 摘 要： | 该文依据引信安全系统设计准则,设计了一种引信用MEMS保险机构。通过分析该机构的工作原理和作用过程可知,该机构可以满足引信依据双环境信息解除保险的安全性设计要求。采用仿真软件CoventorWare对该MEMS机构进行了工艺模拟和仿真,给出该MEMS保险机构的UV-LIGA加工工艺过程。UV-LIGA加工工艺中分别采用2次微电铸过程,得到固连在基板上的运动机构。最后借助ANSYS对该保险机构的力学性能进行了有限元分析,分析结果表明,该机构能够在应力允许范围达到运动位移要求。
|
| 关 键 词： | 微机电系统 引信 保险机构 仿真 |
Process simulation and Static Characteristic Simulation Analysis of MEMS-based Safety and Arming Device |
| |
| NIE Wei-rong,XI Zhan-wen,LI Qi-lei.Process simulation and Static Characteristic Simulation Analysis of MEMS-based Safety and Arming Device[J].Journal of Nanjing University of Science and Technology(Nature Science),2010,34(2). |
| |
| Authors: | NIE Wei-rong XI Zhan-wen LI Qi-lei |
| |
| Institution: | School of Mechanical Engineering/a>;NUST/a>;Nanjing 210094/a>;China |
| |
| Abstract: | According to the criterion of the fuze safety and arming(S&A) system,a new MEMS device that can be used in fuze is designed here.The principles and action process of the MEMS device are analyzed.Its S&A features can satisfy the dual environment guide lines of fuze design.The manufacturing process and static characteristic of the MEMS device are simulated by the software of CoventorWare.The device can be manufactured by improved UV-LIGA.The improved UV-LIGA includes two turns of electroforming,so the movable... |
| |
| Keywords: | micro-electro-mechanical system fuzes safety and arming device simulation |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
