| 用压电陶瓷实现精密工件台的微定位控制 |
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| 引用本文： | 荆涛,项东,叶修齐,李仲侠.用压电陶瓷实现精密工件台的微定位控制[J].吉林大学学报(信息科学版),1997(4). |
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| 作者姓名： | 荆涛 项东 叶修齐 李仲侠 |
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| 作者单位： | 长春邮电学院通信工程系 |
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| 摘 要： | 以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。设计了一个包括高压精密可调电源、压电微位移驱动器、作为反馈元件的光栅干涉仪、以及由ＩＢＭＰＣ机和单片机组成的控制系统。
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| 关 键 词： | 误差补偿 压电陶瓷 微位移 |
The control of micro positioning on precision workpiece stage with piezoelectric ceramic |
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| Abstract: | Based on the principle of micro displacement of piezoelectric ceramic,the research on the precise actuator technique is presented,which is used for precise positioning work piece stage.A principle and subordinate controlling system are proposed.The whole system includes an adjustable high precise power,piezoelectric micro displacement actuator,a grating interferometer acting as the feedback element,and a controlling system organized by IBM PC computer and several 8031 micro controllers. |
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| Keywords: | Error compensation Piezoelectric ceramic Micro displacement |
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