| 水热法制备高折射率的HfO2光学薄膜 |
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| 引用本文： | 王生钊,沈军,罗爱云,刘春泽.水热法制备高折射率的HfO2光学薄膜[J].同济大学学报(自然科学版),2007,35(12):1666-1669. |
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| 作者姓名： | 王生钊 沈军 罗爱云 刘春泽 |
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| 作者单位： | 同济大学,波耳固体物理研究所,上海,200092 |
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| 基金项目： | 国家自然科学基金;国家高技术研究发展计划(863计划) |
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| 摘 要： | 采用水热合成技术制备了HfO2胶体，用旋涂法镀制了单层HfO2介质膜．采用多种仪器设备对薄膜进行性能测试和表征，并用输出波长为1．06μm、脉宽为10ns的电光调Q激光系统产生的强激光测试薄膜的激光损伤阈值．研究表明，水热合成技术制备的HfO2薄膜具有较高的激光损伤阈值、折射率和较好的平整度．对HfO2薄膜激光损伤形貌和成因进行了研究．
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| 关 键 词： | HfO2薄膜 水热合成 高折射率 激光损伤阈值 |
| 文章编号： | 0253-374X(2007)12-1666-04 |
| 修稿时间： | 2006年2月24日 |
Preparation of High Refractive Index HfO2 Thin Films by Hydrothermal Synthesis |
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| WANG Shengzhao,SHEN Jun,LUO Aiyun,LIU Chunze.Preparation of High Refractive Index HfO2 Thin Films by Hydrothermal Synthesis[J].Journal of Tongji University(Natural Science),2007,35(12):1666-1669. |
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| Authors: | WANG Shengzhao SHEN Jun LUO Aiyun LIU Chunze |
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| Abstract: | HfO2 sol was obtained by hydrothermal synthesis.HfO2 thin films were prepared with spin coating method.HfO2 thin films were characterized or examined by many kinds of instruments.And 1-on-1 laser-induced damage threshold tests on HfO2 films were carried out with a Q-switched Nd-YAG high power laser at 1 064 nm with a pulse width of 10ns.The experimental results show that HfO2 thin films can achieve high refractive index,good surface micro morphology and excellent laser induced damage threshold.The morphologies of the laser-induced damage and the reason of it are investigated in the paper. |
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| Keywords: | HfO2 films hydrothermal synthesis high refractive index laser induced damage threshold |
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