| Si/Al/BN多层膜的制备及研究 |
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| 引用本文： | 曲长庆,孙连婕,陈希明,郭燕,吴小国.Si/Al/BN多层膜的制备及研究[J].天津理工大学学报,2012,28(1):76-78,88. |
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| 作者姓名： | 曲长庆 孙连婕 陈希明 郭燕 吴小国 |
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| 作者单位： | 天津理工大学电子信息工程学院,天津市薄膜电子与通信器件重点实验室,天津300384 |
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| 基金项目： | 国家自然科学基金(50972105;60806030);天津市自然科学基金(09JCZDJC16500;08JCYBJC14600) |
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| 摘 要： | 本文采用磁控溅射系统制备了Si/Al/BN多层膜结构,并通过XRD,AFM,傅立叶红外光谱仪,纳米压痕仪等对Si/Al/BN多层膜结构进行了表征,表征结果表明本实验制备的Si/Al/BN多层膜基片符合高频声表面波器件基片的要求,为金刚石/IDT/BN多层膜超高频声表面波器件的制备奠定了基础.
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| 关 键 词： | Si/Al/BN多层膜 高频声表面波 原子力显微镜 纳米压痕仪 |
Research on the deposition of Si/Al/BN multilayer |
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| QU Chang-qing
,
SUN Lian-jie
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CHEN Xi-ming
,
GUO Yan
,
WU Xiao-guo.Research on the deposition of Si/Al/BN multilayer[J].Journal of Tianjin University of Technology,2012,28(1):76-78,88. |
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| Authors: | QU Chang-qing SUN Lian-jie CHEN Xi-ming GUO Yan WU Xiao-guo |
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| Institution: | (School of Electronic Information Engineering,Tianjin Key Laboratory of Film Electronic and Communication Device,Tianjin University of Technology,Tianjin 300384,China) |
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| Abstract: | Si/Al/BN multilayer structure was deposited by magnetron sputtering system,and characterized by XRD,AFM,Fourier transform infrared spectroscopy,Nano-indenter.And the characterization show that the experimental preparation of Si/Al/ BN multilayer substrate meet the requirements of high-frequency surface acoustic wave device,and make a foundation for the preparation of diamond/IDT/BN multilayer ultra-high frequency SAW devices. |
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| Keywords: | Si/Al/BN multilayers high-frequency SAW AFM nano-indenter |
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