纳米多孔 WO3薄膜的溶胶-凝胶制备与热处理

以金属W粉为无机原料，采用溶胶－凝胶技术，结合浸渍镀膜方法，制备出纳米多孔WO3薄膜，研究了热处理对薄膜性能的影响。采用原子力显微镜、红外光谱仪、可见光分光光度计、椭偏仪等仪器测量了薄膜的特性。实验表明：热处理使得薄膜致密，折射率增大（从1．77增加至2．03），厚度减小，WO3颗粒增大；WO3结构发生变化，桥键W－O－W吸收逐渐减弱，且向低波数方向移动，共角W－O－W键吸收越来越强。这些变化归因于热处理导致的WO3颗粒形状、团聚状态的变化以及应力键的产生。

Preparation of Sol- gel Derived Nano Porous WO3 Thin Films and Annealing Effect

The preparation of nano porous tungsten oxide films has been reported using a sol-gel process with the starting tungsten powders together with the dip coating method.The effect of heat treatments on the films has investigated with ellipsometer fourier transform infrared spectroscopy(FTIR),spectrophotometer,atomic force microscopy (AFM) and profile,respectively.Thickness of the films decreases with the annealing temperature increasing,while refractive index of the films increases from 1.77 to 2.03;and WO 3 particles in the films grow,infrared spectroscopy revealed that the absorption of the corner-sharing mode in the films increases,whereas that of the bridging WOW bond diminishes and shifts to a lower wave number during the annealing.These are attributed to a change of WO 3 particle shape and state of aggregation of the particles in the films as well as the formation of strained WOW bonds during the annealing.