阳极氧化InP表面和界面的AES研究

利用俄歇谱线的形状和能量位移分析了阳极氧化InP的表面和界面,对在pH=2.6和pH=6两种酒石酸+丙烯乙二醇电解液生长的InP氧化物,研究了其组分和键合态.

SURFACE AND INTERFACE STUDY OF ANODIC OXIDE ON InP BY AES

Auger line shape and energy shifts were used to analyze the surface and interface anodic oxides on InP. The composition and bonding of oxides grown in pH=2.6 and pH=6 3% tartaric acid-propylene glyool electrolytes were investigated. Plots of P (LMM) and In (M_4,5N_4,5) Auger line shape and energy shifts provide very useful information in distinguishing between In-0 and In-P or P-0 and P-In bondings. The outer layer of oxides consists of a mixture of In₂O₃ and P₂O₅ Both In -0 and P-O bondings penetrate into the same depth and there is no enrichment of element P on the interface, which is different from thermal oxide on InP. There is no sharp interface between anodic oxide and the InP substract. The method for determining the interface region and initial oxidic processes were discussed.