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溶胶-凝胶法制备二氧化硅光学膜
引用本文:胡晓云,周引穗,陆治国. 溶胶-凝胶法制备二氧化硅光学膜[J]. 西北大学学报(自然科学版), 2000, 30(2): 103-105
作者姓名:胡晓云  周引穗  陆治国
作者单位:西北大学物理学系!陕西西安710069
基金项目:西北大学科研基金!资助项目 (97NW0 6 )
摘    要:探讨了在线温度和提拉速度对溶胶-凝胶法制备的SiO2光学膜光学性质的影响,考察了热处理温度对SiO2光学膜表面散射率的影响。结果表明:用溶胶-凝胶法制成的SiO2光学膜随着在线温度的升高,膜的厚度呈线性减少,减少的速度为0.09nm/℃;室温下SiO2光学膜膜厚提拉速度呈指数增长,指数等于0.54;SiO2光学膜表面散射率随热处理温度的升高而增大,且在400℃左右有一个增大的突变点。

关 键 词:溶胶-凝胶法 二氧化硅 散射率 光学膜 制备
修稿时间:1998-09-21

A study on the silica optical coatings form sol-gel process
HU Xiao-yun,ZHOU Yin-sui,LU Zhi-guo. A study on the silica optical coatings form sol-gel process[J]. Journal of Northwest University(Natural Science Edition), 2000, 30(2): 103-105
Authors:HU Xiao-yun  ZHOU Yin-sui  LU Zhi-guo
Abstract:Si O2 thin films have been prepared on silicon substrates by sol- gel method in sols of dip- coating at room temperature. The thickness of thin films and optical properties are technologically dependent. The technology includes concentration of solution,raising speed,on line temperature and treated temperature.The influence of on line temperature and dip speed on opticalproperies of thin film isstudied.The refractive index of thin films increasing with on line temperature is resulted from the structural developing.The influence of treated temperature on the scattering index of film surface has also been investigated.
Keywords:sol- gel  SiO_2  on line temperature  scattering index
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