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用广义Rayleigh波测量压电薄膜结构的初应力
引用本文:刘华,王铁军,王子昆.用广义Rayleigh波测量压电薄膜结构的初应力[J].西安交通大学学报,2000,34(1):76-79.
作者姓名:刘华  王铁军  王子昆
作者单位:西安交通大学,710049,西安
基金项目:金属材料及强度国家重点实验室基金
摘    要:通过求解考虑初应力进的耦合波动方程,研究了覆盖层为各向同性材料,基底灯英俊同各向同性压电材料的压电层状结构中广义Rayleigh波传播时初应力和相速度的关系,结果表明,对于给定的材料参数和薄膜厚度,通过测量薄膜结构中的声表面波传播速度即可确定薄膜中的初应力,这对声表面波器件设计及结构的力学性能分析具有理论意义和实际应用价值。

关 键 词:初应力  压电介质  Rayleigh  压电薄膜
文章编号:0253-987X(2000)01-0076-04
修稿时间:1999-07-24

Generalized Rayleigh Wave for Measuring Initial Stress in Layered Piezoelectric Structure
Liu Hua,Wang Teijun,Wang Zikun.Generalized Rayleigh Wave for Measuring Initial Stress in Layered Piezoelectric Structure[J].Journal of Xi'an Jiaotong University,2000,34(1):76-79.
Authors:Liu Hua  Wang Teijun  Wang Zikun
Abstract:Propagation of generalized Rayleigh wave in a layered piezoelectric structure with initial stress is investigated. It involves a thin elastic layer bonded perfectly to a piezoelectric elastic substrate. Analytical solutions of the mechanical displacement and electrical potential function are obtained for the layer and substrate by solving the coupled electromechanical equations. The relationship between initial stress and phase velocity is obtained. It is shown that the initial stress in the layer can be determined from measurement of the phase velocity. This is significant for the design of acoustic devices that involve measurement of surface waves.
Keywords:initial stress  film  piezoelectric media  generalized Rayleigh wave  phase velocity
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