| 基于隧道效应的振动检测反馈系统设计 |
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| 引用本文： | 陈帆,傅星,李梦超. 基于隧道效应的振动检测反馈系统设计[J]. 河南科技大学学报(自然科学版), 2008, 29(4) |
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| 作者姓名： | 陈帆 傅星 李梦超 |
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| 作者单位： | 天津大学,精密测试技术及仪器国家重点实验室,天津,300072;天津大学,精密测试技术及仪器国家重点实验室,天津,300072;天津大学,精密测试技术及仪器国家重点实验室,天津,300072 |
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| 摘 要： | 针对扫描隧道效应对环境的苛刻要求,旨在设计一种主动隔振系统提高STM工作的稳定性,主要基于隧道效应的原理搭建闭环控制系统,主动适时的响应和补偿振动的干扰.硬件部分包括以DSP为核心的高速精确的测控电路,软件部分解决了数字滤波和PI控制算法在提高控制性能上的关键问题.并利用仿真现象和实验结果进行控制特性和动态响应的分析,证明其良好的实时控制效果.
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| 关 键 词： | 隧道效应 反馈控制电路 PI控制算法 |
Design of Nano-vibration Detection Feedback Control System Based on Tunelling Effect |
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| CHEN Fan,FU Xing,LI Meng-Chao. Design of Nano-vibration Detection Feedback Control System Based on Tunelling Effect[J]. Journal of Henan University of Science & Technology:Natural Science, 2008, 29(4) |
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| Authors: | CHEN Fan FU Xing LI Meng-Chao |
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| Affiliation: | CHEN Fan,FU Xing,LI Meng-Chao(State Key Laboratory of Precision Mearing Technology & Instrument,Tianjin University,Tianjin 300072,China) |
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| Abstract: | The STM is a high precision instrument sensitive to disturbances originating from sound waves,vibrations and temperature variations.All these factors affect the STM operational reliability.As practical experience indicates,STM can not work well in the open loop control system.In this paper,attention is focused on improving the STMs control system.The design of the hardware circuit which depends on DSP is introduced,and the signal processing and PI control arithmetic are also mentioned.Finally,the emulation ... |
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| Keywords: | Tunneling effect Feedback control system Incremental PI control algorithm |
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