| 真空蒸发制备ZnS薄膜及其性能研究 |
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| 引用本文： | 荣利霞 李琦. 真空蒸发制备ZnS薄膜及其性能研究[J]. 内蒙古大学学报(自然科学版), 1999, 30(4): 454-457 |
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| 作者姓名： | 荣利霞 李琦 |
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| 作者单位： | 内蒙古大学物理学系 |
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| 基金项目： | 内蒙古自治区自然科学基金 |
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| 摘 要： | 用真空蒸发技术在玻璃衬底上获得了透明ＺｎＳ薄膜．薄膜为立方闪锌矿结构，呈高阻状态，在可见光范围内有较高的的透过率．在不同条件下对薄膜进行了热处理，研究了热处理对薄膜性能的影响
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| 关 键 词： | ZnS薄膜；真空蒸发；热处理 |
Property Study of ZnS Thin Films Prepared by Vacuum Evaporation |
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| RONG Li xia,LI Qi,LI Rong ping,ZHANG Chang zai,CONG Hui qin,SONG Xiao qin. Property Study of ZnS Thin Films Prepared by Vacuum Evaporation[J]. Acta Scientiarum Naturalium Universitatis Neimongol, 1999, 30(4): 454-457 |
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| Authors: | RONG Li xia LI Qi LI Rong ping ZHANG Chang zai CONG Hui qin SONG Xiao qin |
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| Abstract: | Using the vacuum evaporation technique,we evaporated the transmittance ZnS films on glass substrate.The structure of the films contains cubic sphalerite.The films show high resistivity and high transmissivity in visible spectal range.We annealed the flims in different condition and studied the effection of annealing on properities of films. |
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| Keywords: | ZnS films vacuum evaporation heat treatment |
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