| SnO2薄膜的喷涂法制备 |
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| 引用本文： | 贾维国,宋晓琴.SnO2薄膜的喷涂法制备[J].内蒙古大学学报(自然科学版),1999,30(6):697-698. |
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| 作者姓名： | 贾维国 宋晓琴 |
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| 作者单位： | 内蒙古大学物理学系!内蒙古呼和浩特010021 |
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| 摘 要： | 采用ＳｎＣｌ４ 水解溶液，用喷涂、退火的方法制备ＳｎＯ２ 薄膜，并研究了ＳｎＯ２ 薄膜的电特性和掺杂浓度的关系
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| 关 键 词： | 喷涂法 SnO_2 薄膜 |
Preparation of SnO _2 Thin film by Spraying Method |
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| JIA Wei guo,SONG Xiao qin,ZHANG Chang zai,LIU Yu qin.Preparation of SnO _2 Thin film by Spraying Method[J].Acta Scientiarum Naturalium Universitatis Neimongol,1999,30(6):697-698. |
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| Authors: | JIA Wei guo SONG Xiao qin ZHANG Chang zai LIU Yu qin |
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| Abstract: | Adopted hydrolysis solution of SnCl 4,the SnO 2 films have been preparated by spraying and annealing method.The relation between electrical properties of SnO 2 films and doped impurity concentration have been investigated. |
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| Keywords: | spraying method SnO_2 thin film |
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