动压浮离抛光盘结构化流道的液流特性

针对动压浮离抛光盘流场特性优化问题,提出了楔形、L型、抛物线型3种典型的结构化流道.建立了流场约束数学模型,利用Matlab对比分析了不同结构参数下结构化流道环境产生液体动压的能力,得到了浮力与膜厚关系曲线、压力分布曲线以及浮力与各结构参数的关系曲线.同时,运用Fluent对3种结构化流道环境的流场压强与速度分布进行了仿真.理论计算与仿真结果表明:抛物线形结构化流道产生浮力的能力最强,楔形结构化流道次之,L形结构化流道远落后于前两种;工件安装区域形成的流场速度稳定,有利于非接触式抛光加工.

Flow Field Characteristics of Hydrodynamic Polishing Base Plate with Different Structural Flow Passages

Abstract： Three types of structural flow passages were designed, and flow field characteristics of hydrodynamic polishing base plates in different structure flow passages were studied. A mathematical model of flow field with constraint condition were built based on the liquid dynamic theory, and Matlab was used to compare and analyze the distributions of liquid dynamic pressure at different structural parameters. Relationships between buoyancy and film thickness, pressure distribution, structural parameters were obtained. Fluent software was used to calculate the pressure and speed distribution of flow fields. Theoretical and numerical results show that the largest buoyancy is produced by the parabolic structure flow passage，followed by the wedge structure flow passage, while the L structure flow passage is produces the smallest buoyancy. The flow velocity is relatively stable in the area where the workpiece is adhered, providing good condition for non contact polishing process.