超声原子力显微镜接触模式下样品有限元分析 |
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引用本文: | 孙星星,陈玉.超声原子力显微镜接触模式下样品有限元分析[J].新乡学院学报(自然科学版),2014(12):46-49. |
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作者姓名: | 孙星星 陈玉 |
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作者单位: | 安徽工程大学机械与汽车工程学院 |
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摘 要: | 通过ANSYS有限元的方法对接触模式下的样品进行静力学仿真,以获得不同载荷、不同内部结构大小、不同内部结构位置以及不同材料时针尖和样品接触形变及刚度变化。
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关 键 词: | 超声原子力显微镜 有限元分析 样品 形变与刚度 |
Sample Finite Element Analysis of Ultrasonic Atomic Force Microscope in Contact Vibration |
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Authors: | SUN Xingxing;CHEN Yu |
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Institution: | SUN Xingxing;CHEN Yu;School of Mechanical and Automotive Engineering,Anhui Polytechnic University; |
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Abstract: | Statics simulation of samples in contact vibration were conducted by ANSYS finite element analysis,to get the deformation and stiffness changes of tip-sample contact with different loads,different sizes and location of embedded structure and different materials |
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Keywords: | ultrasonic atomic force microscope finite element analysis sample deformation and stiffness |
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