| YBCO膜上形成类金刚石膜研究 |
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| 引用本文： | 刘心田 余丙鲲. YBCO膜上形成类金刚石膜研究[J]. 上海交通大学学报, 1997, 31(10): 66-68 |
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| 作者姓名： | 刘心田 余丙鲲 |
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| 作者单位： | [1]中国科学院上海技术物理研究所 [2]上海大学物理系 |
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| 摘 要： | 为防止高Ｔｃ超导探测器的超导电性退化或失超，用Ｃ＾＋注入、ＸｅＣｌ准分子激光辐照形成类金刚石（ＤＬＣ）保护膜。该膜结合紧密，克服了ＤＬＣ／ＹＢＣＯ两种材料晶格失配、线胀系数与热导率相差太大的矛盾。对ＤＬＣ膜的Ｒａｍａｎ谱所表征的Ｃ内部结构进行了分析，阐述了石墨态Ｃ转化为ＤＬＣ结构的机制，提出了激光所造成的瞬时高温、高压模型。
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| 关 键 词： | 类金刚石膜 钝化保护膜 薄膜 YBCO 红外探测器 |
Research for Films of Diamond Like Carbon on YBCO Film |
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| Liu Xintian Liu Xinhai Lu Huixiu Yu Rong Tang Dingyuan. Research for Films of Diamond Like Carbon on YBCO Film[J]. Journal of Shanghai Jiaotong University, 1997, 31(10): 66-68 |
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| Authors: | Liu Xintian Liu Xinhai Lu Huixiu Yu Rong Tang Dingyuan |
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| Abstract: | The protective films of DLC by C + implantation and XeCl excimer laser irradiation are used to protect high T c IR detectors from the deterioration or disappearance of superconductivity. The DLC film which is close and firm can be used to solve the problem that the lattice mismatch between the two materials (DLC/YBCO) causes the huge difference of linear extension coefficient and thermal conductivity. The structure of DLC film is analyzed by Raman spectroscopy and the models of momentary high temperature and momentary high pressure caused by laser are presented. |
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| Keywords: | diamond like carbon film DLC/YBCO passivation protection film |
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