| 离子溅射镀膜对纳米材料形貌观察的影响 |
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| 引用本文： | 李昌明,范海陆,尹荔松.离子溅射镀膜对纳米材料形貌观察的影响[J].五邑大学学报(自然科学版),2009,23(2):23-25. |
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| 作者姓名： | 李昌明 范海陆 尹荔松 |
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| 作者单位： | 五邑大学,数理系,广东,江门,529020 |
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| 摘 要： | 通过观察场发射扫描电子显微镜下纳米Cu颗粒离子溅射镀膜前后纳米尺度的形貌，发现镀膜改变了纳米Cu颗粒的形貌，分析了离子溅射膜的形成过程，探讨了镀膜改变纳米颗粒形貌的原因，指出了观察纳米颗粒形貌时应该注意的问题．
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| 关 键 词： | 纳米材料 离子溅射 镀膜 形貌改变 |
Effect of Coating by Ion Sputtering on Observation of Nanometer Materials Morphology |
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| LI Chang-ming,FAN Hai-lu,YIN Li-song.Effect of Coating by Ion Sputtering on Observation of Nanometer Materials Morphology[J].Journal of Wuyi University(Natural Science Edition),2009,23(2):23-25. |
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| Authors: | LI Chang-ming FAN Hai-lu YIN Li-song |
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| Institution: | (Department of Mathematics ＆ Physics, Wuyi University, Jiangmen 529020, China) |
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| Abstract: | The micro-morphology of the nano-copper particles with/without coating by ion sputtering was observed and investigated by using Field Emission Scanning Electron Microscope （FESEM）. The results obtained demonstrate that the micro-morphology of the nano-copper particles was changed. The film coating formation process was analyzed and the reason why the micro-morphology of nano-particles changed was discussed. Finally, points for attention were put forward for observing the morphology of nano-particles. |
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| Keywords: | nanometer materials ion sputtering coating deformation |
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