电容式位移传感器的信号处理电路设计

微电容式传感器技术作为微机电系统研究和制造领域一个重要的分支，近年来在微型化、多功能化、智能化得到迅猛发展。目前该领域的研究虽然有了较大发展，但距实际应用仍存在有待进一步研究和解决的问题。本文在对目前较为常用的几种测量电路结构进行分析的基础上，选取交流激励电容一电压转换电路作为微电容检测方式。通过仿真调试和实验，对交流激励电容测量电路的关键元件参数进行了优化。

Design of Signal Processing Circuit for Capacitive Displacement Sensor

As an important branch of the Micro-Electro-Mechanical System, the research and the manufacture technology of micro-capacitive sensor is developed rapidly in the micro-miniaturization, multi-purpose intelligence in recent years. Although this domain＇s research development greatly at present, hut there are still many questions to be solved in practicality application. In this article, capacity - voltage transformation circuit is selected for the micro-capacity measurement after analysis the several current commonly used measurement circuit structure, the micro-capacity test circuit＇s parameter in essential part is require optimization through the simulation and debugging from experiment.